Executing file on Mac

Has something changed with the execute programs operator?

<?xml version="1.0" encoding="UTF-8"?><process version="9.4.001">
  <context>
    <input/>
    <output/>
    <macros/>
  </context>
  <operator activated="true" class="process" compatibility="9.4.001" expanded="true" name="Process">
    <parameter key="logverbosity" value="init"/>
    <parameter key="random_seed" value="2001"/>
    <parameter key="send_mail" value="never"/>
    <parameter key="notification_email" value=""/>
    <parameter key="process_duration_for_mail" value="30"/>
    <parameter key="encoding" value="SYSTEM"/>
    <process expanded="true">
      <operator activated="true" class="text:create_document" compatibility="8.2.000" expanded="true" height="68" name="generate query" width="90" x="45" y="85">
        <parameter key="text" value="aws athena start-query-execution --query-string &quot;select * from  table  where col0 like 'number';&quot; --result-configuration &quot;OutputLocation=s3://&quot;     &#10;"/>
        <parameter key="add label" value="false"/>
        <parameter key="label_type" value="nominal"/>
      </operator>
      <operator activated="true" class="text:write_document" compatibility="8.2.000" expanded="true" height="82" name="overwrite query" width="90" x="179" y="85">
        <parameter key="file" value="/Users/robinmeisel/Dropbox/psyscore/master.sh"/>
        <parameter key="overwrite" value="true"/>
        <parameter key="encoding" value="SYSTEM"/>
      </operator>
      <operator activated="true" class="productivity:execute_program" compatibility="9.4.001" expanded="true" height="124" name="Execute Program" width="90" x="313" y="85">
        <parameter key="command" value="chmod +x master.sh"/>
        <parameter key="log_stdout" value="true"/>
        <parameter key="log_stderr" value="false"/>
        <parameter key="working_directory" value="/Users/execute"/>
        <list key="env_variables"/>
      </operator>
      <operator activated="true" class="productivity:execute_program" compatibility="9.4.001" expanded="true" height="124" name="Execute Program (2)" width="90" x="447" y="85">
        <parameter key="command" value="./master.sh"/>
        <parameter key="log_stdout" value="true"/>
        <parameter key="log_stderr" value="true"/>
        <parameter key="working_directory" value="/Users/execute"/>
        <list key="env_variables"/>
      </operator>
      <connect from_op="generate query" from_port="output" to_op="overwrite query" to_port="document"/>
      <connect from_op="overwrite query" from_port="document" to_op="Execute Program" to_port="through 1"/>
      <connect from_op="Execute Program" from_port="out" to_op="Execute Program (2)" to_port="through 1"/>
      <portSpacing port="source_input 1" spacing="0"/>
      <portSpacing port="sink_result 1" spacing="0"/>
    </process>
  </operator>
</process>

I am now getting this error where the process used to work perfectly. Any ideas?